Product Information
Precision and quality in every detail.
Upper Electrode Quartz Ring
Ensures stable gas flow, uniform plasma distribution, and effective electrode protection
Quartz
Quartz Processing Technology
Quartz features excellent optical properties, corrosion resistance, and thermal stability. It is widely used in the semiconductor, optoelectronics, and precision industries.
Core Processing Capabilities
- Precision Cutting: ±0.01mm high-precision machining, suitable for various size designs.
- Surface Grinding & Polishing: Surface roughness (Ra) as low as 0.01μm to ensure optical quality.
- CNC Precision Machining: Capable of producing complex 3D structures, ideal for high-precision components.
- High-Purity Cleaning: Removes particles and impurities to meet cleanroom application standards.
Quartz Material Properties
- High Optical Transparency: Excellent transmittance in DUV/UV wavelengths, ideal for optical processes.
- Corrosion Resistance: Withstands aggressive chemicals such as hydrofluoric acid and chlorine.
- Thermal Stability & Low Thermal Expansion: Minimizes thermal stress, ensuring long-term dimensional stability.
Advantages in Etching Equipment Applications
- Improved Gas Distribution Uniformity: Ensures consistent etching performance.
- Reduced Particle Contamination: Lowers process defects and improves yield.
- Prolong the lifetime of the reaction chamber by minimizing plasma bombardment damage.
Quartz Ring Application
Lower Electrode Quartz Ring
Prevent chemical corrosion, improve plasma concentration, and reduce energy loss.
