Product Information

Precision and quality in every detail.

High-Purity Graphite

K-MAX provides high-purity graphite processing products specifically designed for the semiconductor industry, meeting the high standards required for components inside ion process equipment. Our graphite products are known for their high purity, excellent electrical conductivity, hardness, cleanliness, and outstanding high-temperature resistance. These qualities effectively enhance the stability and efficiency of equipment operation.

Product Features

  • High-Purity and Electrical Conductivity: Suitable for a wide range of high-temperature applications.
  • High-Temperature and Corrosion Resistance: Withstands harsh operating conditions and extends service life.
  • High-Precision Machining Capability: Supports customization of complex shapes and high-precision components.
  • Flexible Applications: Ideal for use in ion implanters, CVD (Chemical Vapor Deposition), and other core semiconductor equipment.

Graphite Processing Technology

  • CNC High-Precision Machining: Optimized for the characteristics of graphite materials, enabling efficient cutting with extremely tight tolerances to ensure precision and stability.
  • Surface Treatment Technology: Enhances the durability and smoothness of graphite components while effectively controlling particle generation.
  • Customized Design: Tailored design and machining services based on specific customer requirements, covering various shapes and sizes.

Semiconductor Applications

  • Ion Implanter Components: The stability of graphite ensures efficiency and precision during the implantation process.
  • CVD and PECVD Process Equipment: Graphite components offer exceptional chemical stability under high-temperature conditions.

K-MAX actively supports customers in optimizing CIP processes and improving yield by providing the following professional services:

Selection of Materials and Surface Coatings with Enhanced Ion Bombardment Resistance

By choosing high-durability materials or applying specialized surface coatings, we effectively extend component lifespan and reduce equipment maintenance frequency.

Surface Processing and Material Selection to Minimize Process Particles

Through advanced surface treatment technologies, we minimize particle generation during processing, thereby enhancing product yield and process stability.

Through technological innovation and material optimization, we deliver high-efficiency, high-quality process solutions tailored to our customers’ needs.